Coverart for item
The Resource Computational lithography, Xu Ma and Gonzalo R. Arce

Computational lithography, Xu Ma and Gonzalo R. Arce

Label
Computational lithography
Title
Computational lithography
Statement of responsibility
Xu Ma and Gonzalo R. Arce
Creator
Contributor
Author
Subject
Genre
Language
eng
Member of
Cataloging source
UMI
http://library.link/vocab/creatorDate
1983-
http://library.link/vocab/creatorName
Ma, Xu
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
Arce, Gonzalo R
Series statement
Wiley series in pure and applied optics
http://library.link/vocab/subjectName
  • Photolithography
  • Integrated circuits
  • Semiconductors
  • Resolution (Optics)
Label
Computational lithography, Xu Ma and Gonzalo R. Arce
Link
http://databases.mvlc.org/connect/safari?uiCode=&xmlId=9781118043578
Instantiates
Publication
Copyright
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
ocn840106094
Dimensions
unknown
Extent
1 online resource (1 volume)
Form of item
  • online
  • electronic
Isbn
9781118043578
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations.
Sound
unknown sound
Specific material designation
remote
Stock number
CL0500000211
Label
Computational lithography, Xu Ma and Gonzalo R. Arce
Link
http://databases.mvlc.org/connect/safari?uiCode=&xmlId=9781118043578
Publication
Copyright
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
ocn840106094
Dimensions
unknown
Extent
1 online resource (1 volume)
Form of item
  • online
  • electronic
Isbn
9781118043578
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations.
Sound
unknown sound
Specific material designation
remote
Stock number
CL0500000211

Library Locations

    • Merrimack Valley Library ConsortiumBorrow it
      4 High Street, Suite 175, North Andover, MA, 01845, US
      42.7009413 -71.1255084
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